Publication:

Interface control of high k gate dielectrics on Ge

Date

2007
Proceedings Paper
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dc.contributor.authorCaymax, Matty
dc.contributor.authorHoussa, Michel
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorBellenger, Florence
dc.contributor.authorMartens, Koen
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-16T15:14:15Z
dc.date.available2021-10-16T15:14:15Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11835
dc.source.conference5th International Symposium on Control of Semiconductor Interfaces ISCSI-V
dc.source.conferencedate12/11/2007
dc.source.conferencelocationTokyo Japan
dc.title

Interface control of high k gate dielectrics on Ge

dc.typeProceedings paper
dspace.entity.typePublication
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