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Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's

Date

2002
Proceedings Paper
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dc.contributor.authorIacopi, Francesca
dc.contributor.authorTokei, Zsolt
dc.contributor.authorShamiryan, Denis
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorMalhouitre, Stéphane
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned2021-10-14T21:52:15Z
dc.date.available2021-10-14T21:52:15Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6420
dc.source.beginpage61
dc.source.conferenceConference Proceedings ULSI XVII
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
dc.source.endpage66
dc.title

Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's

dc.typeProceedings paper
dspace.entity.typePublication
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