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Dual brush process for selective surface modification in graphoepitaxy directed self-assembly
Publication:
Dual brush process for selective surface modification in graphoepitaxy directed self-assembly
Date
2017
Proceedings Paper
https://doi.org/10.1117/12.2259791
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35256.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Doise, Jan
;
Chan, BT
;
Hori, Masafumi
;
Gronheid, Roel
Journal
Abstract
Description
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Views
1950
since deposited on 2021-10-24
Acq. date: 2025-10-28
Citations
Metrics
Views
1950
since deposited on 2021-10-24
Acq. date: 2025-10-28
Citations