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Investigation of plasma hydrogenation and trapping mechanism for layer transfer
Publication:
Investigation of plasma hydrogenation and trapping mechanism for layer transfer
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Peng
;
Chu, Paul K.
;
Hochbauer, T.
;
Lee, J-K
;
Nastasi, M.
;
Buca, D.
;
Mantl, S
;
Loo, Roger
;
Caymax, Matty
;
Alford, T.
;
Mayer, J.W.
;
David Theodore, N.
;
Cai, M.
;
Schmidt, B.
;
Lau, S.S.
Journal
Applied Physics Letters
Abstract
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1918
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423
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Acq. date: 2025-10-24
Citations
Metrics
Views
1918
since deposited on 2021-10-16
423
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations