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EUV detectors based on AlGaN-on-Si Schottky photodiodes

Date

2011
Meeting abstract
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dc.contributor.authorMalinowski, Pawel
dc.contributor.authorDuboz, Jean-Yves
dc.contributor.authorDe Moor, Piet
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorJohn, Joachim
dc.contributor.authorSrivastava, Puneet
dc.contributor.authorSemond, Fabrice
dc.contributor.authorFrayssinet, Eric
dc.contributor.authorBenMoussa, Ali
dc.contributor.authorGiordanengo, Boris
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorMertens, Robert
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.date.accessioned2021-10-19T15:56:30Z
dc.date.available2021-10-19T15:56:30Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19367
dc.source.beginpage807302
dc.source.conferenceOptical Sensors; and Photonic Crystal Fibers V
dc.source.conferencedate18/04/2011
dc.source.conferencelocationPrague Czech Republic
dc.title

EUV detectors based on AlGaN-on-Si Schottky photodiodes

dc.typeMeeting abstract
dspace.entity.typePublication
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