Publication:

Defect inspection methodology for Contact Holes

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3015844
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dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorBeral, Christophe
dc.contributor.authorChowrira Poovanna Bhavishya
dc.contributor.authorFoubert, Philippe
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorLorusso, Gian
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorDas, Shubhankar
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorSugie, M.
dc.contributor.authorBan, N.
dc.contributor.authorKoike, H.
dc.contributor.authorIsawa, M.
dc.contributor.authorSun, W.
dc.contributor.imecauthorVan den Heuvel, D.
dc.contributor.imecauthorBeral, C.
dc.contributor.imecauthorChowrira, B.
dc.contributor.imecauthorFoubert, P.
dc.contributor.imecauthorDe Simone, D.
dc.contributor.imecauthorLorusso, G.
dc.contributor.imecauthorBeggiato, M.
dc.contributor.imecauthorDas, S.
dc.contributor.imecauthorCharley, A.
dc.date.accessioned2024-06-15T17:25:53Z
dc.date.available2024-06-15T17:25:53Z
dc.date.issued2024
dc.identifier.doi10.1117/12.3015844
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44051
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage129551F
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedate2024-02-28
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages8
dc.title

Defect inspection methodology for Contact Holes

dc.typeProceedings paper
dspace.entity.typePublication
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