Publication:

Formation of germanium shallow junction by flash annealing

Date

2007
Journal article
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dc.contributor.authorSatta, Alessandra
dc.contributor.authorD'Amore, Antonio
dc.contributor.authorSimoen, Eddy
dc.contributor.authorAnwand, W
dc.contributor.authorSkorupa, W
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVan Daele, Benny
dc.contributor.authorJanssens, Tom
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-16T19:23:31Z
dc.date.available2021-10-16T19:23:31Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12841
dc.source.beginpage157
dc.source.endpage160
dc.source.issue1_2
dc.source.journalNuclear Instruments and Methods B
dc.source.volume257
dc.title

Formation of germanium shallow junction by flash annealing

dc.typeJournal article
dspace.entity.typePublication
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