Publication:

Improved fin width scaling in fully-depleted FinFETs

Date

2008
Proceedings Paper
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dc.contributor.authorDuffy, Ray
dc.contributor.authorVan Dal, Mark
dc.contributor.authorPawlak, Bartek
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorRooyackers, Rita
dc.contributor.authorKaiser, M.
dc.contributor.authorWeemaes, R. G. R.
dc.contributor.authorJurczak, Gosia
dc.contributor.authorLander, Rob
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-17T06:57:53Z
dc.date.available2021-10-17T06:57:53Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13680
dc.source.beginpage334
dc.source.conference38th European Sooid-State Device Research Conference - ESSDERC
dc.source.conferencedate16/09/2008
dc.source.conferencelocationEdinburgh UK
dc.source.endpage337
dc.title

Improved fin width scaling in fully-depleted FinFETs

dc.typeProceedings paper
dspace.entity.typePublication
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