Publication:

Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications

Date

2018
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorGroven, Benjamin
dc.contributor.authorTomczak, Yoann
dc.contributor.authorNalin Mehta, Ankit
dc.contributor.authorBender, Hugo
dc.contributor.authorZhang, Haodong
dc.contributor.authorSchram, Tom
dc.contributor.authorSmets, Quentin
dc.contributor.authorHeyns, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorTomczak, Yoann
dc.contributor.imecauthorNalin Mehta, Ankit
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecNalin Mehta, Ankit::0000-0002-2169-940X
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-25T19:18:06Z
dc.date.available2021-10-25T19:18:06Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30811
dc.source.conferenceMaterial Science and Engineering Congress - MSE
dc.source.conferencedate26/09/2018
dc.source.conferencelocationDarmstadt Germany
dc.title

Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions