Publication:

Outlier analysis for understanding process variations and probable defects

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2616679
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dc.contributor.authorGupta, Mihir
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorHalder, Sandip
dc.contributor.authorDusa, Mircea
dc.contributor.imecauthorGupta, Mihir
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorDusa, Mircea
dc.contributor.orcidimecGupta, Mihir::0000-0003-0286-7997
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2023-08-24T09:09:09Z
dc.date.available2023-06-20T10:33:07Z
dc.date.available2023-08-24T09:09:09Z
dc.date.embargo2022-05-26
dc.date.issued2022
dc.identifier.doi10.1117/12.2616679
dc.identifier.eisbn978-1-5106-4982-8
dc.identifier.isbn978-1-5106-4981-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41798
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 120530Q
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateFEB 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages8
dc.source.volume12053
dc.title

Outlier analysis for understanding process variations and probable defects

dc.typeProceedings paper
dspace.entity.typePublication
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