Publication:
New approach for the formation and separation of a thin porous silicon layer
Date
| dc.contributor.author | Solanki, Chetan Singh | |
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-14T13:48:48Z | |
| dc.date.available | 2021-10-14T13:48:48Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4758 | |
| dc.source.beginpage | 266 | |
| dc.source.conference | 2nd Porous Semiconductors Science and Technology Conference; | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 267 | |
| dc.title | New approach for the formation and separation of a thin porous silicon layer | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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