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Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)

Date

1995
Proceedings Paper
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dc.contributor.authorLibezny, Milan
dc.contributor.authorPoortmans, Jef
dc.contributor.authorAmesz, Peter Henk
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorLarsen, Kim Kyllesbech
dc.contributor.authorVandenabeele, Peter
dc.contributor.authorJonckx, Franky
dc.contributor.authorMaex, Karen
dc.contributor.authorNijs, Johan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-09-29T13:09:20Z
dc.date.available2021-09-29T13:09:20Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/725
dc.source.beginpage389
dc.source.conferenceRapid Thermal and Integrated Processing IV
dc.source.conferencedate17/04/1995
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage394
dc.title

Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)

dc.typeProceedings paper
dspace.entity.typePublication
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