Spectroscopic study of oxygen related lattice defects in annealed silicon

dc.contributor.author	Vanhellemont, Jan
dc.contributor.author	Libezny, Milan
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Claeys, C.
dc.contributor.author	Clauws, P.
dc.contributor.author	Blondeel, A.
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-09-29T13:22:13Z
dc.date.available	2021-09-29T13:22:13Z
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/974
dc.source.beginpage	2399
dc.source.conference	22nd International Conference on the Physics of Semiconductors; 15-19 August 1994; vancouver, BC, Canada.
dc.source.conferencelocation
dc.source.endpage	402
dc.title	Spectroscopic study of oxygen related lattice defects in annealed silicon
dc.type	Proceedings paper
dspace.entity.type	Publication
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