Publication:

Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere

Date

2013
Journal article
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorNaumov, Sergej
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorMüller, Matthias
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-21T09:09:34Z
dc.date.available2021-10-21T09:09:34Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22656
dc.identifier.urlhttp://jss.ecsdl.org/content/2/5/N93.abstract
dc.source.beginpageN93
dc.source.endpageN98
dc.source.issue5
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume2
dc.title

Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere

dc.typeJournal article
dspace.entity.typePublication
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