Finite element simulations of the mechanical stress in and around TiSi2 lines

dc.contributor.author	Steegen, An
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Maex, Karen
dc.contributor.author	Ignat, M.
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-01T09:01:13Z
dc.date.available	2021-10-01T09:01:13Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2973
dc.source.beginpage	227
dc.source.conference	Micromechanical Structures for Materials Research
dc.source.conferencedate	15/04/1998
dc.source.conferencelocation	San Francisco, CA USA
dc.source.endpage	232
dc.title	Finite element simulations of the mechanical stress in and around TiSi2 lines
dc.type	Proceedings paper
dspace.entity.type	Publication
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