Publication:

Thermal stability of Pt and C-doped NiSi films

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorPagès, X.
dc.contributor.authorBauer, M.
dc.contributor.authorThomas, S.
dc.contributor.authorMertens, Sofie
dc.contributor.authorVerheyden, K.
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorGranneman, E.
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorMertens, Sofie
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.date.accessioned2021-10-16T17:43:40Z
dc.date.available2021-10-16T17:43:40Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12531
dc.source.beginpage145
dc.source.conference15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate2/10/2007
dc.source.conferencelocationCatania Italy
dc.source.endpage149
dc.title

Thermal stability of Pt and C-doped NiSi films

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
16265.pdf
Size:
1.06 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions