Publication:
Excimer laser microvia technology in MCMs
Date
| dc.contributor.author | Manirambona, B. | |
| dc.contributor.author | De Baets, Johan | |
| dc.contributor.author | Vervaet, A. | |
| dc.contributor.imecauthor | De Baets, Johan | |
| dc.date.accessioned | 2021-10-14T22:17:57Z | |
| dc.date.available | 2021-10-14T22:17:57Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6570 | |
| dc.source.conference | E-MRS Spring Meeting Symposium D: Physics and Chemistry of Laser Materials Processing | |
| dc.source.conferencedate | 18/06/2002 | |
| dc.source.conferencelocation | Strasbourg France | |
| dc.title | Excimer laser microvia technology in MCMs | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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