Publication:

Cu Pad Height Evaluation Technique Using Four-Directional BSE Signal of SEM for Hybrid Bonding Applications

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051014

Simple item page Full metadata Statistics

Author(s)

;

;

;

Hasumi, Kazuhisa

;

;

;

;

Tunca Altintas, Bensu

;

Bogdanowicz, Janusz

;

;

;

;

Charley, Anne-Laure

;

Journal

Proceedings of SPIE

Statistics

58 since deposited on 2025-07-28

2last month

2last week

Acq. date: 2026-08-05