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Conference contributions
Electrical characterization of ultra shallow dopant profiles
Publication:
Electrical characterization of ultra shallow dopant profiles
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Date
1999
Proceedings Paper
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3267.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Collart, E. J. H.
;
Murell, A. J.
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Abstract
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1861
since deposited on 2021-10-06
Acq. date: 2025-12-12
Citations
Metrics
Views
1861
since deposited on 2021-10-06
Acq. date: 2025-12-12
Citations