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Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleans

Date

2010
Proceedings Paper
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dc.contributor.authorHalder, Sandip
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorVos, Rita
dc.contributor.authorKenis, Karine
dc.contributor.authorClaes, Martine
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T16:48:38Z
dc.date.available2021-10-18T16:48:38Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17206
dc.source.conference240th ACS National Meeting
dc.source.conferencedate22/08/2010
dc.source.conferencelocationBoston, MA USA
dc.title

Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleans

dc.typeProceedings paper
dspace.entity.typePublication
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