Regularized Autoencoder for The Analysis of Multivariate Metrology Data

Simple item page Full metadata Statistics

Author(s)

;

;

Charley, Anne-Laure

;

Leray, Philippe

;

Kondo, Tsuyoshi

;

Shindo, Hiroyuki

;

Ebizuka, Yasushi

;

;

Journal

Proceedings of SPIE

Metrics

1277 since deposited on 2022-09-08

Acq. date: 2025-10-23