Publication:

Regularized Autoencoder for The Analysis of Multivariate Metrology Data

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2613729

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Author(s)

;

;

Charley, Anne-Laure

;

Leray, Philippe

;

Kondo, Tsuyoshi

;

Shindo, Hiroyuki

;

Ebizuka, Yasushi

;

;

Journal

Proceedings of SPIE

Statistics

1283 since deposited on 2022-09-08

Acq. date: 2026-07-18