Publication:

Influences of oxide loss on contamination removal

Date

2004
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorEitoku, Atsuro
dc.contributor.authorSnow, Jim
dc.contributor.authorVos, Rita
dc.contributor.authorKenis, Karine
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.date.accessioned2021-10-15T13:19:42Z
dc.date.available2021-10-15T13:19:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8876
dc.source.conference7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate20/09/2004
dc.source.conferencelocationBrussel Belgium
dc.title

Influences of oxide loss on contamination removal

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations