Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

dc.contributor.author	Aarts, Arno
dc.contributor.author	Srivannavit, Onnop
dc.contributor.author	Wise, Kensall D.
dc.contributor.author	Yoon, Euisik
dc.contributor.author	Pereira Neves, Hercules
dc.contributor.author	Puers, Bob
dc.contributor.author	Van Hoof, Chris
dc.contributor.imecauthor	Aarts, Arno
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Van Hoof, Chris
dc.date.accessioned	2021-10-18T15:14:59Z
dc.date.available	2021-10-18T15:14:59Z
dc.date.issued	2010
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16621
dc.source.beginpage	165
dc.source.conference	21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate	26/09/2010
dc.source.conferencelocation	Enschede The Netherlands
dc.source.endpage	168
dc.title	Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process
dc.type	Proceedings paper
dspace.entity.type	Publication
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