Publication:
High performance La-doped HZO based ferroelectric capacitors by interfacial engineering
| dc.contributor.author | Popovici, Mihaela Ioana | |
| dc.contributor.author | Bizindavyi, Jasper | |
| dc.contributor.author | Favia, Paola | |
| dc.contributor.author | Clima, Sergiu | |
| dc.contributor.author | Alam, Md Nur Kutubul | |
| dc.contributor.author | Ramachandran, R. K. | |
| dc.contributor.author | Walke, Amey | |
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.author | Leonhardt, A. | |
| dc.contributor.author | Mukherjee, Shankha | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Illiberi, A. | |
| dc.contributor.author | Givens, M. | |
| dc.contributor.author | Delhougne, Romain | |
| dc.contributor.author | Van Houdt, Jan | |
| dc.contributor.author | Kar, Gouri Sankar | |
| dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
| dc.contributor.imecauthor | Bizindavyi, Jasper | |
| dc.contributor.imecauthor | Favia, Paola | |
| dc.contributor.imecauthor | Clima, Sergiu | |
| dc.contributor.imecauthor | Alam, Md Nur Kutubul | |
| dc.contributor.imecauthor | Walke, Amey | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.imecauthor | Mukherjee, Shankha | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Delhougne, Romain | |
| dc.contributor.imecauthor | Van Houdt, Jan | |
| dc.contributor.imecauthor | Kar, Gouri Sankar | |
| dc.contributor.orcidimec | Popovici, Mihaela Ioana::0000-0002-9838-1088 | |
| dc.contributor.orcidimec | Bizindavyi, Jasper::0000-0002-2213-9017 | |
| dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
| dc.contributor.orcidimec | Clima, Sergiu::0000-0002-4044-9975 | |
| dc.contributor.orcidimec | Alam, Md Nur Kutubul::0000-0002-4608-3556 | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.contributor.orcidimec | Van Houdt, Jan::0000-0003-1381-6925 | |
| dc.date.accessioned | 2023-06-01T13:56:31Z | |
| dc.date.available | 2023-05-25T20:20:22Z | |
| dc.date.available | 2023-06-01T13:56:31Z | |
| dc.date.issued | 2022 | |
| dc.identifier.doi | 10.1109/IEDM45625.2022.10019525 | |
| dc.identifier.eisbn | 978-1-6654-8959-1 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41626 | |
| dc.publisher | IEEE | |
| dc.source.conference | International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | DEC 03-07, 2022 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | High performance La-doped HZO based ferroelectric capacitors by interfacial engineering | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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