Publication:
Study of the reliability impact of chlorine precursor residues in the Atomic Layer Deposited HfO2 layers
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1842 since deposited on 2021-10-16
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Acq. date: 2026-05-01
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Statistics
Views
1842 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-05-01
Citations