Publication:
Study of the reliability impact of chlorine precursor residues in the Atomic Layer Deposited HfO2 layers
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1839 since deposited on 2021-10-16
3last month
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Acq. date: 2025-12-10
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Views
1839 since deposited on 2021-10-16
3last month
3last week
Acq. date: 2025-12-10
Citations