Publication:

Review on process induced defects in high resistivity silicon

Date

1996
Meeting abstract
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dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVanhellemont, Jan
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-09-29T14:19:29Z
dc.date.available2021-09-29T14:19:29Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1126
dc.source.beginpage471
dc.source.conferenceElectrochemical Society 190th Fall Meeting: Symposium on High Purity Silicon IV
dc.source.conferencedate6/10/1996
dc.source.conferencelocationSan Antonio, TX USA
dc.title

Review on process induced defects in high resistivity silicon

dc.typeMeeting abstract
dspace.entity.typePublication
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