Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Electrochemical and analytical study of the Si etching mechanism in HF
Publication:
Electrochemical and analytical study of the Si etching mechanism in HF
Copy permalink
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
19136.pdf
126.3 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Valckx, Nick
;
Vos, Rita
;
Rip, Jens
;
Doumen, Geert
;
Mertens, Paul
;
Bearda, Twan
;
Heyns, Marc
;
De Gendt, Stefan
Journal
Abstract
Description
Metrics
Views
1906
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1906
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-11
Citations