Replacement fin processing for III-V on Si: From FinFets to nanowires

dc.contributor.author	Waldron, Niamh
dc.contributor.author	Merckling, Clement
dc.contributor.author	Teugels, Lieve
dc.contributor.author	Ong, Patrick
dc.contributor.author	Sebaai, Farid
dc.contributor.author	Barla, Kathy
dc.contributor.author	Collaert, Nadine
dc.contributor.author	Thean, Aaron
dc.contributor.imecauthor	Waldron, Niamh
dc.contributor.imecauthor	Merckling, Clement
dc.contributor.imecauthor	Teugels, Lieve
dc.contributor.imecauthor	Ong, Patrick
dc.contributor.imecauthor	Sebaai, Farid
dc.contributor.imecauthor	Barla, Kathy
dc.contributor.imecauthor	Collaert, Nadine
dc.contributor.imecauthor	Thean, Aaron
dc.contributor.orcidimec	Merckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimec	Teugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimec	Ong, Patrick::0000-0002-2072-292X
dc.contributor.orcidimec	Collaert, Nadine::0000-0002-8062-3165
dc.date.accessioned	2021-10-23T16:58:20Z
dc.date.available	2021-10-23T16:58:20Z
dc.date.issued	2016
dc.identifier.issn	0038-1101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/27563
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0038110115002737
dc.source.beginpage	81
dc.source.endpage	91
dc.source.issue	Part B
dc.source.journal	Solid-State Electronics
dc.source.volume	115
dc.title	Replacement fin processing for III-V on Si: From FinFets to nanowires
dc.type	Journal article
dspace.entity.type	Publication
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