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Electrical defects in heteroepitaxial nanometer CMOS technology
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Electrical defects in heteroepitaxial nanometer CMOS technology
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Bargallo Gonzalez, Mireia
;
Eneman, Geert
;
Hikavyy, Andriy
;
Loo, Roger
;
Simoen, Eddy
Journal
Semiconductor Manufacturing China
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1836
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Acq. date: 2025-12-15
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Views
1836
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations