Publication:

Geometry effect on impurity incorporation and grain growth in narrow copper lines

Date

2005
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorZhang, Wenqi
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorHeylen, Nancy
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-16T07:26:36Z
dc.date.available2021-10-16T07:26:36Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11602
dc.source.beginpageC832
dc.source.endpageC837
dc.source.issue12
dc.source.journalJournal of the Electrochemical Society
dc.source.volume152
dc.title

Geometry effect on impurity incorporation and grain growth in narrow copper lines

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles