Publication:
Screening of second-generation high-index liquids
Date
| dc.contributor.author | Hendrickx, Eric | |
| dc.contributor.author | Postnikov, Sergey | |
| dc.contributor.author | Foubert, Philippe | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Kim, Byeong Soo | |
| dc.contributor.imecauthor | Hendrickx, Eric | |
| dc.contributor.imecauthor | Foubert, Philippe | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-16T16:34:08Z | |
| dc.date.available | 2021-10-16T16:34:08Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12270 | |
| dc.source.beginpage | 65190A | |
| dc.source.conference | Advances in Resist Materials and Processing Technology XXIV | |
| dc.source.conferencedate | 25/02/2007 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Screening of second-generation high-index liquids | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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