Publication:

Probabilistic Process Window: A new approach to focus-exposure analysis

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2614445

Simple item page Full metadata Statistics

Author(s)

;

Yannuzzi, Jonathan

;

;

;

De Simone, Danilo

;

Weldeslassie, Ataklti

;

Vandenbroeck, Nadia

;

Foubert, Philippe

;

Beral, Christophe

;

Charley, Anne-Laure

Journal

Proceedings of SPIE

Statistics

1469 since deposited on 2022-09-08

Acq. date: 2026-06-26