Publication:
Low Temperature Anneal of Electron Irradiation Induced Defects in p-Type Silicon
Date
| dc.contributor.author | Trauwaert, Marie-Astrid | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Langouche, G. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.date.accessioned | 2021-09-29T12:48:57Z | |
| dc.date.available | 2021-09-29T12:48:57Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/379 | |
| dc.source.conference | 1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain. | |
| dc.title | Low Temperature Anneal of Electron Irradiation Induced Defects in p-Type Silicon | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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