Publication:
Innovative characterization techniques for ultra-scaled FinFETs
Date
| dc.contributor.author | Tettamanzi, G.C. | |
| dc.contributor.author | Lansbergen, G.P. | |
| dc.contributor.author | Verduijn, J. | |
| dc.contributor.author | Rahman, R. | |
| dc.contributor.author | Paul, A. | |
| dc.contributor.author | Lee, S. | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.author | Klimeck, G. | |
| dc.contributor.author | Rogge, S. | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-18T22:15:54Z | |
| dc.date.available | 2021-10-18T22:15:54Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18076 | |
| dc.source.beginpage | 25 | |
| dc.source.conference | 10th IEEE International Conference on Nanotechnology and Joint Symposium with Nano Korea | |
| dc.source.conferencedate | 17/08/2010 | |
| dc.source.conferencelocation | Seoul South Korea | |
| dc.source.endpage | 30 | |
| dc.title | Innovative characterization techniques for ultra-scaled FinFETs | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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