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Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
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Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3010940
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Ying-Lin
;
Deforce, Jacob
;
De Ridder, Vic
;
Dey, Bappaditya
;
Blanco, Victor
;
Halder, Sandip
;
Leray, Philippe
Journal
Proceedings of SPIE
Abstract
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Downloads
90
since deposited on 2024-06-15
14
last month
1
last week
Acq. date: 2026-02-26
Views
660
since deposited on 2024-06-15
6
last month
Acq. date: 2026-02-26
Citations