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On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reaction

Date

2013
Journal article
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dc.contributor.authorSchrauwen, Annelore
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorKumar, Arul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorComrie, C
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVantomme, Andre
dc.date.accessioned2021-10-21T11:50:23Z
dc.date.available2021-10-21T11:50:23Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23054
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/114/6/10.1063/1.4818333
dc.source.beginpage63518
dc.source.issue6
dc.source.journalJournal of Applied Physics
dc.source.volume114
dc.title

On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reaction

dc.typeJournal article
dspace.entity.typePublication
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