Publication:

A wet etching technique to reveal threading dislocations in thin germanium layers

Date

2008
Proceedings Paper
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dc.contributor.authorSouriau, Laurent
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-17T10:57:45Z
dc.date.available2021-10-17T10:57:45Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14505
dc.source.beginpage83
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces VIII - UCPSS
dc.source.conferencedate18/09/2006
dc.source.conferencelocationAntwerpen Belgium
dc.source.endpage86
dc.title

A wet etching technique to reveal threading dislocations in thin germanium layers

dc.typeProceedings paper
dspace.entity.typePublication
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