Publication:
Mechanical reliability of low-k dielectrics
Date
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Li, Han | |
| dc.contributor.author | Vlassak, Joost J. | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-10-20T18:06:47Z | |
| dc.date.available | 2021-10-20T18:06:47Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21751 | |
| dc.source.beginpage | 339 | |
| dc.source.book | Advanced Interconnects for ULSI Technology | |
| dc.source.endpage | 368 | |
| dc.title | Mechanical reliability of low-k dielectrics | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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