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System-level impact of interconnect line-edge roughness
Publication:
System-level impact of interconnect line-edge roughness
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baert, Rogier
;
Ciofi, Ivan
;
Roussel, Philippe
;
Mattii, Luca
;
Debacker, Peter
;
Tokei, Zsolt
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Views
1883
since deposited on 2021-10-25
1
last month
1
last week
Acq. date: 2026-03-17
Citations