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Interface trap density metrology of state-of-the-art undoped Si n-FinFETs
Publication:
Interface trap density metrology of state-of-the-art undoped Si n-FinFETs
Date
2011
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tettamanzi, Giuseppe
;
Paul, Abhijeet
;
Lee, Sunhee
;
Mehrotra, S.R.
;
Collaert, Nadine
;
Biesemans, Serge
;
Klimeck, G.
;
Rogge, Sven
Journal
IEEE Electron Device Letters
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1884
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1884
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations