Publication:
Removal of Si-O, Si-C and Si-F by hydrogen bake after reactive ion etching on the silicon surface
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1932 since deposited on 2021-09-30
Acq. date: 2025-12-09
Citations
Metrics
Views
1932 since deposited on 2021-09-30
Acq. date: 2025-12-09
Citations