Publication:

Evaluation of Ta-Co alloys as novel high-k EUV mask absorber

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614235
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Author(s)

Thakare, Devesh  
;
Wu, Meiyi  
;
Opsomer, Karl  
;
Detavernier, Christophe
;
Naujok, Philipp
;
Saadeh, Qais
;
Soltwisch, Victor
;
Delabie, Annelies  
;
Philipsen, Vicky  

Journal

Proceedings of SPIE

Abstract

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1369 since deposited on 2022-09-19
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Acq. date: 2025-10-24

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1369 since deposited on 2022-09-19
420item.page.metrics.field.last-week
Acq. date: 2025-10-24

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