Publication:

Evaluation of Ta-Co alloys as novel high-k EUV mask absorber

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2614235

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Author(s)

Thakare, Devesh

;

;

;

Detavernier, Christophe

;

Naujok, Philipp

;

;

Soltwisch, Victor

;

Delabie, Annelies

;

Philipsen, Vicky

Journal

Proceedings of SPIE

Metrics

1372 since deposited on 2022-09-19

Acq. date: 2025-12-11