Suitability of Half-Wavelength Contact Acoustic Microscopy to detect deeply buried voids

dc.contributor.author	van Neer, P. L. M. J.
dc.contributor.author	van Willigen, D. M.
dc.contributor.author	Horchens, L.
dc.contributor.author	Gerritsma, A. M.
dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Chen, Cong
dc.contributor.author	Quesson, B. A. J.
dc.contributor.imecauthor	Bogdanowicz, J.
dc.contributor.imecauthor	Chen, C.
dc.date.accessioned	2025-07-28T03:57:28Z
dc.date.available	2025-07-28T03:57:28Z
dc.date.issued	2025
dc.identifier.doi	10.1117/12.3050820
dc.identifier.eisbn	978-1-5106-8639-7
dc.identifier.isbn	978-1-5106-8638-0
dc.identifier.issn	0277-786X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/45955
dc.publisher	SPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage	134261M-1
dc.source.conference	2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate	2025-02-24
dc.source.conferencelocation	San Jose
dc.source.endpage	134261M-4
dc.source.journal	Proceedings of SPIE
dc.source.numberofpages	4
dc.title	Suitability of Half-Wavelength Contact Acoustic Microscopy to detect deeply buried voids
dc.type	Proceedings paper
dspace.entity.type	Publication
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