Publication:

Characterization of (ultra)thin dielectrica

Date

2000
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Author(s)

Vandervorst, Wilfried  
;
De Witte, Hilde
;
Conard, Thierry  
;
Janssens, Tom
;
Schaekers, Marc  
;
Brijs, Bert
;
Houssa, Michel  

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1977 since deposited on 2021-10-14
Acq. date: 2026-05-17

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1977 since deposited on 2021-10-14
Acq. date: 2026-05-17

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