Publication:

New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications

Date

2017
Meeting abstract
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Author(s)

Hou, Lin  
;
Derakhshandeh, Jaber  
;
Bex, Pieter  
;
Capuz, Giovanni  
;
Van De Peer, Myriam  
;
Wang, Teng
;
Houshmand Sharifi, Shamin  
;
De Preter, Inge  
;
Rebibis, Kenneth June  
;
Beyer, Gerald  
;
Beyne, Eric  
;
De Wolf, Ingrid  

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Abstract

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