Publication:

Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In-Ga-Zn Oxide Thin-Film Transistors

Date

2021
Journal article
https://doi.org/10.1021/acsaelm.0c01091
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dc.contributor.authorGlushkova, Anastasia, V
dc.contributor.authorDekkers, Harold
dc.contributor.authorNag, Manoj
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorRamalingam, Jothilingam
dc.contributor.authorGenoe, Jan
dc.contributor.authorHeremans, Paul
dc.contributor.authorRolin, Cedric
dc.contributor.imecauthorGlushkova, Anastasia, V
dc.contributor.imecauthorDekkers, Harold F. W.
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorRolin, Cedric
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.orcidimecGlushkova, Anastasia, V::0000-0001-7191-6217
dc.contributor.orcidimecDekkers, Harold F. W.::0000-0003-4778-5709
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecGlushkova, Anastasia::0000-0001-7191-6217
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecRolin, Cedric::0000-0001-5542-8504
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.date.accessioned2022-02-21T11:43:17Z
dc.date.available2022-02-21T11:43:17Z
dc.date.issued2021
dc.identifier.doi10.1021/acsaelm.0c01091
dc.identifier.issn2637-6133
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38941
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage1268
dc.source.endpage1278
dc.source.issue3
dc.source.journalACS APPLIED ELECTRONIC MATERIALS
dc.source.numberofpages11
dc.source.volume3
dc.title

Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In-Ga-Zn Oxide Thin-Film Transistors

dc.typeJournal article
dspace.entity.typePublication
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