Publication:
1Xnm copper and low-k reliability
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-19T19:42:34Z | |
| dc.date.available | 2021-10-19T19:42:34Z | |
| dc.date.issued | 2011-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19894 | |
| dc.source.beginpage | 777 | |
| dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
| dc.source.conferencedate | 28/09/2011 | |
| dc.source.conferencelocation | Nagoya Japan | |
| dc.source.endpage | 778 | |
| dc.title | 1Xnm copper and low-k reliability | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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