Publication:
Narrow trench corrosion
Date
| dc.contributor.author | Ernur, Didem | |
| dc.contributor.author | Kondo, Seiichi | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Ernur, Didem | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T21:35:59Z | |
| dc.date.available | 2021-10-14T21:35:59Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6312 | |
| dc.source.beginpage | 503 | |
| dc.source.conference | Advanced Metallization Conference 2001 | |
| dc.source.conferencedate | 9/10/2001 | |
| dc.source.conferencelocation | Montreal Canada | |
| dc.source.endpage | 507 | |
| dc.title | Narrow trench corrosion | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |