Publication:

Scalable Patterning Modules for Diffractive Optics on 300 mm Substrates

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2649739

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Author(s)

;

Willegems, Myriam

;

Thirumalai, Sundar

;

;

Asbahi, Mohamed

;

Kutrzeba Kotowska, Bogumila

;

;

Storace, Eleonora

Journal

Proceedings of SPIE

Statistics

777 since deposited on 2024-03-14

Acq. date: 2026-05-15