Publication:

The effects of scaling on back end of line processing

Date

2014
Proceedings Paper
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dc.contributor.authorVerdonck, Patrick
dc.contributor.authorWilson, Chris
dc.contributor.authorWen, Liang Gong
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorWilson, Chris
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-22T07:48:14Z
dc.date.available2021-10-22T07:48:14Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24764
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6940080&queryText%3DThe+effects+of+scaling+on+back+end+of+line+pr
dc.source.beginpage1
dc.source.conference29th Symposium on Microelectronics Technology and Devices - SBMICRO
dc.source.conferencedate1/09/2014
dc.source.conferencelocationAracaju Brazil
dc.source.endpage4
dc.title

The effects of scaling on back end of line processing

dc.typeProceedings paper
dspace.entity.typePublication
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